专利内容由知识产权出版社提供
专利名称：A contrast-enhancing agent for
photolithography
发明人：Ichimura,Kunihiro,Yonezawa,Teruhiko,Kikuch…申请号：EP87304498.6申请日：19870520公开号：EP0246885A2公开日：19871125
摘要：A contrast-enhancing agent for photolithography which comprises:
申请人：Japan as represented by Director-General, Agency of Industrial Science andTechnology,TOYO GOSEI KOGYO CO., LTD.
地址：3-1, Kasumigaseki 1-chome Chiyoda-ku Tokyo 100 JP,1603, KamimyotenIchikawa-shi Chiba-ken JP
国籍：JP,JP
代理机构：Allard, Susan Joyce
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