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专利名称：Semiconductor circuit components and
capacitors
发明人：Scott Jeffrey DeBoer,F. Daniel Gealy,Randhir
P. S. Thakur
申请号：US08/916771申请日：19970820公开号：US05910880A公开日：19990608
摘要：The invention pertains to semiconductor circuit components and capacitors. Inanother aspect, the invention includes a capacitor having a) a first capacitor plate; b) afirst tantalum-comprising layer over the first capacitor plate; c) a second tantalum-comprising layer over the first tantalum-comprising layer, the second tantalum-comprising layer having nitrogen; and d) a second capacitor plate over the secondtantalum- comprising layer. In another aspect, the invention includes a component having:a) a first tantalum-comprising layer; and b) a second tantalum- comprising layer over thefirst tantalum-comprising layer, the second tantalum-comprising layer having nitrogen.
申请人：MICRON TECHNOLOGY, INC.
代理机构：Wells, St. John, Roberts, Gregory & Matkin, P
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