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Nwell to nwell isolation

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专利名称:Nwell to nwell isolation发明人:Shaoping Tang,Zhiqiang Wu申请号:US11343695申请日:20060131

公开号:US20070176263A1公开日:20070802

摘要:Multiple blanket implant one or more p-type dopants, which are injected intosemiconductor substrate, to be performed, in order to separate in the substratebetween the subsequent areas NWELL. It executes code-pattern and injects

intrabasement punch through isolation area p-type dopant is made to be implanted todepth and be sufficiently separated the regions NWELL. The regions NWELL that theconcentration of this increased p-type dopant helps to leak between mitigation arecloser to together as the regions NWELL, to increase packed density.

申请人:Shaoping Tang,Zhiqiang Wu

地址:Plano TX US,Plano TX US

国籍:US,US

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